Construct · 1 fields · 1 citations

anisotropic etching: a standalone construct

One name. One construct. A landmark on the map.

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Microfabrication

etching crystalline silicon in alkaline solutions at rates that depend strongly on crystal orientation, giving well-defined facets.

In microfabrication, anisotropic etching refers to etching crystalline silicon in alkaline solutions at rates that depend strongly on crystal orientation, giving well-defined facets. This meaning comes from Seidel (1990) in Journal of The Electrochemical Society.[1]

Unit
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Measured by

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Nearby constructs

crystal4 fields · 4 citationsjingle · one word, four constructs etching3 fields · 4 citationsjingle · one word, three constructs orientation4 fields · 5 citationsjingle · one word, four constructs

References

Seidel, H., Csepregi, L., Heuberger, A., & Baumgärtel, H. (1990). Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I. Orientation Dependence and Behavior of Passivation Layers. Journal of The Electrochemical Society, 137(11), 3612-3626. https://doi.org/10.1149/1.2086277

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