Construct · 1 fields · 1 citations

Dill parameters: a standalone construct

One name. One construct. A landmark on the map.

● anchor · a standalone construct Nearest construct by meaning·not indexed

A single standalone construct; nearby constructs are located against it in the Collider. Tap a field for its definition, unit, and measures.

Microfabrication

set of parameters describing bleachable and nonbleachable absorption and exposure rate of a photoresist for lithography modeling.

In microfabrication, Dill parameters refers to set of parameters describing bleachable and nonbleachable absorption and exposure rate of a photoresist for lithography modeling. This meaning comes from Dill (1975) in IEEE Transactions on Electron Devices.[1]

Unit
Recovery means
Measured by

Run it through the Collider, or take the citations with you.

See how Dill parameters sits against neighbouring constructs in the Collider, or export every reference on this page in one click.

Open in Collider Export BibTeX Report this entry

Nearby constructs

absorption6 fields · 6 citationsjingle · one word, six constructs exposure6 fields · 13 citationsjingle · one name, six constructs lithography3 fields · 3 citationsinvariant · one construct, three systems

References

Dill, F. H., Hornberger, W. P., Hauge, P. S., & Shaw, J. M. (1975). Characterization of positive photoresist. IEEE Transactions on Electron Devices, 22(7), 445-452. https://doi.org/10.1109/t-ed.1975.18159

Cited on this page?

Confirm your construct, or correct us.

If your work is cited behind one of these entries, you know better than we do whether we captured the meaning right. Confirm it, suggest an edit, or dispute it, and your name goes on the entry as an author who has checked it, linked to your ORCID.

Claim your construct