Construct · 1 fields · 1 citations

extreme ultraviolet lithography: a standalone construct

One name. One construct. A landmark on the map.

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extreme ultravioletlithography1 CONSTRUCTExtreme ultravioletWAGNER · MICROFABRICATION

A single standalone construct; nearby constructs are located against it in the Collider. Tap a field for its definition, unit, and measures.

Microfabrication

lithography using 13.5 nanometer light with reflective optics to print the smallest chip features.

In microfabrication, extreme ultraviolet lithography refers to lithography using 13.5 nanometer light with reflective optics to print the smallest chip features. This meaning comes from Wagner (2010) in Nature Photonics.[1]

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Nearby constructs

lithography3 fields · 3 citationsinvariant · one construct, three systems

References

  1. Wagner, C., & Harned, N. (2010). Lithography gets extreme. Nature Photonics, 4(1), 24-26. https://doi.org/10.1038/nphoton.2009.251

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