Construct · 1 fields · 1 citations

inverse lithography technology: a standalone construct

One name. One construct. A landmark on the map.

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Lithography

computing photomask patterns by solving an inverse imaging problem so the printed wafer pattern best matches the design.

In lithography, inverse lithography technology refers to computing photomask patterns by solving an inverse imaging problem so the printed wafer pattern best matches the design. This meaning comes from Poonawala (2007) in IEEE Transactions on Image Processing.[1]

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Nearby constructs

image4 fields · 5 citationsjingle · one word, four constructs lithography3 fields · 3 citationsinvariant · one construct, three systems pattern4 fields · 5 citationsjingle · one word, four constructs

References

Poonawala, A., & Milanfar, P. (2007). Mask Design for Optical Microlithography: An Inverse Imaging Problem. IEEE Transactions on Image Processing, 16(3), 774-788. https://doi.org/10.1109/tip.2006.891332

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