Construct · 1 fields · 1 citations

MEMS inertial sensor: a standalone construct

One name. One construct. A landmark on the map.

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Microsystems

micromachined accelerometers and vibrating gyroscopes that measure acceleration and rotation from the motion of tiny proof masses.

In microsystems, MEMS inertial sensor refers to micromachined accelerometers and vibrating gyroscopes that measure acceleration and rotation from the motion of tiny proof masses. This meaning comes from Yazdi (1998) in Proceedings of the IEEE.[1]

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Nearby constructs

acceleration4 fields · 4 citationsjingle · one word, four constructs measure2 fields · 4 citationsjingle · one word, two constructs motion2 fields · 2 citationsjingle · one word, two constructs

References

Yazdi, N., Ayazi, F., & Najafi, K. (1998). Micromachined inertial sensors. Proceedings of the IEEE, 86(8), 1640-1659. https://doi.org/10.1109/5.704269

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