Construct · 1 fields · 1 citations

MEMS stiction: a standalone construct

One name. One construct. A landmark on the map.

● anchor · a standalone construct Nearest construct by meaning·not indexed
MEMSstiction1 CONSTRUCTMEMS stictionMABOUDIAN · MICROSYSTEMS

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Microsystems

unintended permanent sticking of compliant microstructures to nearby surfaces by capillary, van der Waals or electrostatic forces.

In microsystems, MEMS stiction refers to unintended permanent sticking of compliant microstructures to nearby surfaces by capillary, van der Waals or electrostatic forces. This meaning comes from Maboudian (1997) in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena.[1]

Unit
Recovery means
Measured by

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Nearby constructs

measurement3 fields · 5 citationsjingle · one word, three constructsstiction1 fields · 1 citationsanchor · a standalone construct

References

  1. Maboudian, R., & Howe, R. T. (1997). Critical Review: Adhesion in surface micromechanical structures. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 15(1), 1-20. https://doi.org/10.1116/1.589247

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