Construct · 1 fields · 1 citations

micro-electro-mechanical systems: a standalone construct

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Microsystems

miniature mechanical structures made in silicon with integrated-circuit techniques to act as sensors and actuators.

In microsystems, micro-electro-mechanical systems refers to miniature mechanical structures made in silicon with integrated-circuit techniques to act as sensors and actuators. This meaning comes from Petersen (1982) in Proceedings of the IEEE.[1]

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country of origin4 fields · 6 citationsjingle · a cue in the head, a rule in law squeeze3 fields · 3 citationsjingle · one word, three constructs

References

Petersen, K. E. (1982). Silicon as a mechanical material. Proceedings of the IEEE, 70(5), 420-457. https://doi.org/10.1109/proc.1982.12331

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