Construct · 1 fields · 1 citations

nonlinear limit of MEMS resonators: a standalone construct

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nonlinear limitof MEMS resonators1 CONSTRUCTNonlinear limit of MEMSKAAJAKARI · MEMS AND

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MEMS and microfluidics

the largest vibration amplitude of a micromechanical resonator before mechanical or electrostatic nonlinearity causes bifurcation, which bounds energy storage and noise performance.

In MEMS and microfluidics, nonlinear limit of MEMS resonators refers to the largest vibration amplitude of a micromechanical resonator before mechanical or electrostatic nonlinearity causes bifurcation, which bounds energy storage and noise performance. This meaning comes from Kaajakari (2004) in Journal of Microelectromechanical Systems.[1]

Unit
Recovery means
Measured by

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Nearby constructs

amplitude4 fields · 4 citationsjingle · one word, four constructsbifurcation3 fields · 5 citationsjingle · one word, three constructsenergy5 fields · 10 citationsjingle · one word, five constructs

References

  1. Kaajakari, V., Mattila, T., Oja, A., & Seppa, H. (2004). Nonlinear Limits for Single-Crystal Silicon Microresonators. Journal of Microelectromechanical Systems, 13(5), 715-724. https://doi.org/10.1109/jmems.2004.835771

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