Construct · 1 fields · 1 citations

thermomechanical noise: a standalone construct

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Microsystems

random motion of a sensor's proof mass driven by thermal agitation, set by its damping and temperature and limiting resolution.

In microsystems, thermomechanical noise refers to random motion of a sensor's proof mass driven by thermal agitation, set by its damping and temperature and limiting resolution. This meaning comes from Gabrielson (1993) in IEEE Transactions on Electron Devices.[1]

Unit
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Nearby constructs

damping3 fields · 4 citationsjingle · one word, three constructs mass3 fields · 9 citationsjingle · one word, three constructs motion2 fields · 2 citationsjingle · one word, two constructs

References

Gabrielson, T. B. (1993). Mechanical-thermal noise in micromachined acoustic and vibration sensors. IEEE Transactions on Electron Devices, 40(5), 903-909. https://doi.org/10.1109/16.210197

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