Construct · 1 fields · 1 citations

virtual metrology: a standalone construct

One name. One construct. A landmark on the map.

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Manufacturing engineering

predicting product measurements from process and equipment data so every wafer or part gets an estimate without physical measurement.

In manufacturing engineering, virtual metrology refers to predicting product measurements from process and equipment data so every wafer or part gets an estimate without physical measurement. This meaning comes from Khan (2007) in IEEE Transactions on Semiconductor Manufacturing.[1]

Unit
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Measured by

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Nearby constructs

measurement3 fields · 5 citationsjingle · one word, three constructs process3 fields · 3 citationsjingle · one word, three constructs product3 fields · 3 citationsjingle · one word, three constructs

References

Khan, A. A., Moyne, J. R., & Tilbury, D. M. (2007). An Approach for Factory-Wide Control Utilizing Virtual Metrology. IEEE Transactions on Semiconductor Manufacturing, 20(4), 364-375. https://doi.org/10.1109/tsm.2007.907609

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