Construct · 1 fields · 1 citations

inductively coupled plasma: a standalone construct

One name. One construct. A landmark on the map.

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Plasma physics

a plasma sustained by currents induced from an RF coil, giving high density at low pressure for processing.

In plasma physics, inductively coupled plasma refers to a plasma sustained by currents induced from an RF coil, giving high density at low pressure for processing. This meaning comes from Hopwood (1992) in Plasma Sources Science and Technology.[1]

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Nearby constructs

coil3 fields · 3 citationsjingle · one word, three constructs density4 fields · 6 citationsjingle · one word, four constructs inductively coupled plasma mass spectrometry1 fields · 1 citationsanchor · a standalone construct

References

Hopwood, J. (1992). Review of inductively coupled plasmas for plasma processing. Plasma Sources Science and Technology, 1(2), 109-116. https://doi.org/10.1088/0963-0252/1/2/006

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