Construct · 1 fields · 1 citations

line edge roughness: a standalone construct

One name. One construct. A landmark on the map.

● anchor · a standalone construct Nearest construct by meaning·not indexed
line edgeroughness1 CONSTRUCTLine edge roughnessASENOV · SEMICONDUCTOR DEVICE

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Semiconductor device physics

random roughness along the patterned edges of a transistor gate that causes variation in threshold voltage and leakage between nominally identical devices.

In semiconductor device physics, line edge roughness refers to random roughness along the patterned edges of a transistor gate that causes variation in threshold voltage and leakage between nominally identical devices. This meaning comes from Asenov (2003) in IEEE Transactions on Electron Devices.[1]

Unit
Recovery means
Measured by

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Nearby constructs

edge5 fields · 5 citationsjingle · one word, five constructsgate5 fields · 6 citationsjingle · one word, five constructsleakage3 fields · 4 citationsjingle · one word, three constructs

References

  1. Asenov, A., Kaya, S., & Brown, A. R. (2003). Intrinsic parameter fluctuations in decananometer mosfets introduced by gate line edge roughness. IEEE Transactions on Electron Devices, 50(5), 1254-1260. https://doi.org/10.1109/ted.2003.813457

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