Construct · 1 fields · 1 citations

molecular beam epitaxy: a standalone construct

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Semiconductor manufacturing

crystal growth in ultrahigh vacuum from thermal beams of atoms or molecules, giving atomic-layer control.

In semiconductor manufacturing, molecular beam epitaxy refers to crystal growth in ultrahigh vacuum from thermal beams of atoms or molecules, giving atomic-layer control. This meaning comes from Cho (1975) in Progress in Solid State Chemistry.[1]

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Nearby constructs

epitaxy1 fields · 3 citationsanchor · one construct, one field beam1 fields · 2 citationsanchor · a standalone construct control4 fields · 5 citationsjingle · one word, four constructs

References

Cho, A. Y., & Arthur, J. R. (1975). Molecular beam epitaxy. Progress in Solid State Chemistry, 10, 157-191. https://doi.org/10.1016/0079-6786(75)90005-9

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