Construct · 1 fields · 3 citations

epitaxy: a standalone construct

One name. One construct. A landmark on the map.

● anchor · one construct, one field Nearest construct by meaning·not indexed
epitaxy1 CONSTRUCTEpitaxyFRANK · EPITAXY

A single standalone construct; nearby constructs are located against it in the Collider. Tap a field for its definition, unit, and measures.

Semiconductor / crystal growth

Growing a crystal layer aligned to its substrate

Epitaxy is the growth of a crystalline layer that takes its orientation from the single-crystal substrate beneath it, so the deposited film continues the substrate's lattice rather than nucleating at random. When film and substrate differ in lattice spacing, the strained layer stays coherent only up to a critical thickness, beyond which misfit dislocations form. This is the theory developed by Frank and van der Merwe's 1949 One-dimensional dislocations. I. Static theory and by Matthews and Blakeslee's 1974 analysis of defects in epitaxial multilayers; Herman and Sitter's Molecular beam epitaxy is a standard treatment of the practice. The referent is lattice-registered layer growth, characterised by crystalline quality, misfit strain, and the critical thickness at which dislocations appear, the foundation of nearly every modern semiconductor device structure.[1][2][3]

Unit
The crystalline quality and misfit strain of the grown layer, and its critical thickness
Recovery means
Not applicable
Measured by
Assessed by X-ray diffraction, reflection high-energy electron diffraction, and transmission electron microscopy of layer registry and misfit dislocations

Next

Run it through the Collider, or take the citations with you.

See how epitaxy sits against neighbouring constructs in the Collider, or export every reference on this page in one click.

Open in ColliderExport BibTeXReport this entry

Nearby constructs

misfit2 fields · 3 citationsjingle · one word, two constructsbeam1 fields · 2 citationsanchor · a standalone constructform4 fields · 7 citationsjingle · one word, four constructs

References

  1. Frank, F. C., & van der Merwe, J. H. (1949). One-dimensional dislocations. I. Static theory. Proceedings of the Royal Society of London. Series A, 198(1053), 205–216. https://doi.org/10.1098/rspa.1949.0095
  2. Matthews, J. W., & Blakeslee, A. E. (1974). Defects in epitaxial multilayers: I. Misfit dislocations. Journal of Crystal Growth, 27, 118–125. https://doi.org/10.1016/0022-0248(74)90424-2
  3. Herman, M. A., & Sitter, H. (1989). Molecular beam epitaxy: Fundamentals and current status. Springer-Verlag. ISBN 9783642971006

Cited on this page?

Confirm your construct, or correct us.

If your work is cited behind one of these entries, you know better than we do whether we captured the meaning right. Confirm it, suggest an edit, or dispute it, and your name goes on the entry as an author who has checked it, linked to your ORCID.

Claim your construct