Construct · 1 fields · 1 citations

reactive sputtering: a standalone construct

One name. One construct. A landmark on the map.

● anchor · a standalone construct Nearest construct by meaning·not indexed

A single standalone construct; nearby constructs are located against it in the Collider. Tap a field for its definition, unit, and measures.

Semiconductor manufacturing

sputtering a metal target in a reactive gas to deposit compounds, with hysteresis as the target surface becomes poisoned.

In semiconductor manufacturing, reactive sputtering refers to sputtering a metal target in a reactive gas to deposit compounds, with hysteresis as the target surface becomes poisoned. This meaning comes from Berg (2005) in Thin Solid Films.[1]

Unit
Recovery means
Measured by

Run it through the Collider, or take the citations with you.

See how reactive sputtering sits against neighbouring constructs in the Collider, or export every reference on this page in one click.

Open in Collider Export BibTeX Report this entry

Nearby constructs

deposit1 fields · 1 citationsanchor · a standalone construct hysteresis4 fields · 4 citationsjingle · one word, four constructs surface3 fields · 3 citationsjingle · one word, three constructs

References

Berg, S., & Nyberg, T. (2005). Fundamental understanding and modeling of reactive sputtering processes. Thin Solid Films, 476(2), 215-230. https://doi.org/10.1016/j.tsf.2004.10.051

Cited on this page?

Confirm your construct, or correct us.

If your work is cited behind one of these entries, you know better than we do whether we captured the meaning right. Confirm it, suggest an edit, or dispute it, and your name goes on the entry as an author who has checked it, linked to your ORCID.

Claim your construct