Construct · 1 fields · 1 citations

run-to-run control: a standalone construct

One name. One construct. A landmark on the map.

● anchor · a standalone construct Nearest construct by meaning·not indexed

A single standalone construct; nearby constructs are located against it in the Collider. Tap a field for its definition, unit, and measures.

Manufacturing engineering

batch process control that adjusts recipe settings between runs using measurements of previous runs.

In manufacturing engineering, run-to-run control refers to batch process control that adjusts recipe settings between runs using measurements of previous runs. This meaning comes from Sachs (1995) in IEEE Transactions on Semiconductor Manufacturing.[1]

Unit
Recovery means
Measured by

Run it through the Collider, or take the citations with you.

See how run-to-run control sits against neighbouring constructs in the Collider, or export every reference on this page in one click.

Open in Collider Export BibTeX Report this entry

Nearby constructs

batch1 fields · 2 citationsanchor · a standalone construct control4 fields · 5 citationsjingle · one word, four constructs procedural justice4 names · 5 citationsjangle · one fair process, four literatures

References

Sachs, E., Hu, A., & Ingolfsson, A. (1995). Run by run process control: combining SPC and feedback control. IEEE Transactions on Semiconductor Manufacturing, 8(1), 26-43. https://doi.org/10.1109/66.350755

Cited on this page?

Confirm your construct, or correct us.

If your work is cited behind one of these entries, you know better than we do whether we captured the meaning right. Confirm it, suggest an edit, or dispute it, and your name goes on the entry as an author who has checked it, linked to your ORCID.

Claim your construct