Construct · 1 fields · 1 citations

scatterometry: a standalone construct

One name. One construct. A landmark on the map.

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scatterometry1 CONSTRUCTScatterometryRAYMOND · METROLOGY

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Metrology

inferring the dimensions of periodic microstructures by fitting their measured diffraction signature to modeled signatures.

In metrology, scatterometry refers to inferring the dimensions of periodic microstructures by fitting their measured diffraction signature to modeled signatures. This meaning comes from Raymond (1995) in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena.[1]

Unit
Recovery means
Measured by

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Nearby constructs

diffraction4 fields · 4 citationsjingle · one word, four kinds of wave spreadingmeasurement3 fields · 5 citationsjingle · one word, three constructssignature3 fields · 4 citationsjingle · one word, three constructs

References

  1. Raymond, C. J., Murnane, M. R., Sohail, S., Naqvi, H., & McNeil, J. R. (1995). Metrology of subwavelength photoresist gratings using optical scatterometry. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 13(4), 1484-1495. https://doi.org/10.1116/1.588176

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