Construct · 1 fields · 1 citations

spatial atomic layer deposition: a standalone construct

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spatial atomiclayer deposition1 CONSTRUCTSpatial atomic layerPOODT · SEMICONDUCTOR

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Semiconductor manufacturing

atomic layer deposition with precursors separated in space rather than time, moving the substrate between zones for higher throughput.

In semiconductor manufacturing, spatial atomic layer deposition refers to atomic layer deposition with precursors separated in space rather than time, moving the substrate between zones for higher throughput. This meaning comes from Poodt (2011) in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films.[1]

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Nearby constructs

atomic layer deposition1 fields · 1 citationsanchor · a standalone constructlayer3 fields · 5 citationsjingle · one word, three constructssubstrate3 fields · 3 citationsjingle · one word, three constructs

References

  1. Poodt, P., Cameron, D. C., Dickey, E., George, S. M., Kuznetsov, V., Parsons, G. N., Roozeboom, F., Sundaram, G., & Vermeer, A. (2011). Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 30(1). https://doi.org/10.1116/1.3670745

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