Construct · 1 fields · 1 citations

atomic layer deposition: a standalone construct

One name. One construct. A landmark on the map.

● anchor · a standalone construct Nearest construct by meaning·not indexed
atomic layerdeposition1 CONSTRUCTAtomic layer depositionGEORGE · SEMICONDUCTOR

A single standalone construct; nearby constructs are located against it in the Collider. Tap a field for its definition, unit, and measures.

Semiconductor manufacturing

thin-film growth by alternating self-limiting surface reactions, giving one atomic layer per cycle and conformal coverage.

In semiconductor manufacturing, atomic layer deposition refers to thin-film growth by alternating self-limiting surface reactions, giving one atomic layer per cycle and conformal coverage. This meaning comes from George (2009) in Chemical Reviews.[1]

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Nearby constructs

conformal3 fields · 3 citationsinvariant · one construct, three systemscoverage3 fields · 3 citationsjingle · one word, three constructscycle4 fields · 4 citationsjingle · one word, four constructs

References

  1. George, S. M. (2009). Atomic Layer Deposition: An Overview. Chemical Reviews, 110(1), 111-131. https://doi.org/10.1021/cr900056b

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