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capacitive micromachined ultrasonic transducer: a standalone construct

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capacitive micromachinedultrasonic transducer1 CONSTRUCTCapacitive micromachinedLADABAUM · MEDICAL ULTRASOUND

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Medical ultrasound

ultrasound transducer made of tiny vibrating membranes over gaps in silicon, driven electrostatically rather than by a piezoelectric crystal.

In medical ultrasound, capacitive micromachined ultrasonic transducer refers to ultrasound transducer made of tiny vibrating membranes over gaps in silicon, driven electrostatically rather than by a piezoelectric crystal. This meaning comes from Ladabaum (1998) in IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.[1]

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References

  1. Ladabaum, I., Jin, X., Soh, H. T., Atalar, A., & Khuri-Yakub, B. T. (1998). Surface micromachined capacitive ultrasonic transducers. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 45(3), 678-690. https://doi.org/10.1109/58.677612

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