Construct · 1 fields · 1 citations

phase-shift mask: a standalone construct

One name. One construct. A landmark on the map.

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Microfabrication

photomask that shifts the phase of light through alternate openings so destructive interference sharpens printed features.

In microfabrication, phase-shift mask refers to photomask that shifts the phase of light through alternate openings so destructive interference sharpens printed features. This meaning comes from Levenson (1982) in IEEE Transactions on Electron Devices.[1]

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Nearby constructs

interference4 fields · 5 citationsjingle · one word, four unrelated constructs mask3 fields · 3 citationsjingle · one word, three constructs phase5 fields · 6 citationsjingle · one word, five constructs

References

Levenson, M. D., Viswanathan, N. S., & Simpson, R. A. (1982). Improving resolution in photolithography with a phase-shifting mask. IEEE Transactions on Electron Devices, 29(12), 1828-1836. https://doi.org/10.1109/t-ed.1982.21037

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