Construct · 1 fields · 1 citations

sputter yield: a standalone construct

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Semiconductor manufacturing

the average number of target atoms ejected per incident ion, explained through linear collision cascades.

In semiconductor manufacturing, sputter yield refers to the average number of target atoms ejected per incident ion, explained through linear collision cascades. This meaning comes from Sigmund (1969) in Physical Review.[1]

Unit
Recovery means
Measured by

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Nearby constructs

collision3 fields · 7 citationsjingle · one word, three constructs number3 fields · 6 citationsjingle · one word, three constructs target4 fields · 6 citationsjingle · one word, four constructs

References

Sigmund, P. (1969). Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets. Physical Review, 184(2), 383-416. https://doi.org/10.1103/physrev.184.383

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